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| Brand Name: | UW |
| MOQ: | 1set |
| Price: | Negotiation |
| Payment Terms: | T/T |
Equipment Overview
The equipment is designed for marking wafers up to 8 inches in size, as well as for scribing MARK points and characters on ITO glass.
Highlights
• High-Precision Recognition: Equipped with one set of high-precision alignment cameras, two sets of global recognition cameras, and one set of self-inspection camera.
• High-Precision Assembly: Features a marble base and high-precision linear motors for the drive axes.
• Superior Accuracy: Delivers high marking precision and is equipped with a self-inspection function after marking.
Technical Specifications
| Parameter Name | Parameter Value |
| Marble Positioning Accuracy | ≤ 10μm (Factory Parallelism / Flatness / Perpendicularity / Squareness) |
| XY Repeatability | ±0.5μm |
| XY Straightness | 3μm (Within every 300mm range) |
| Laser Z-axis Repeatability | ±3μm |
| Resolution | 1920pixel×2560pixel |
| Vision Accuracy | 1pix = 1μm (FOV within 2mm) |
| Laser Source | Picosecond Laser |
| Wavelength (nm) | 300nm - 600nm |
| Temperature Parameters | Temperature range 10 - 40℃, ±0.1℃ |
| Dimensions | W: 1650mm; H: 1070mm; D: 1900mm (Subject to final product) |
| Weight | 1800KG (Subject to final product) |
| Dimensions | Up to 8 inches |
| Wafer | Line width ≤ 50μm, Positioning accuracy ±0.01mm |
| ITO Glass | Line width ≤ 50μm, Positioning accuracy ±0.01mm |
| Laser Output Mode | Galvo Scanner / Output Head |
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